UV - 950 single-frame, up to 8'' wafers, compact tabletop size, for low capacity requirements
FEATURES
Safe, Ozone-free UV Irradiation
Uses optimized wavelength for UV curing process. Low-pressure mercury vapor lamps do not harmful produce ozone emissions, therefore they do not require special cooling or nitrogen systems. CE Approved, the UV-950provides a safe operating environment and economicalutility requirements.
TECHNOLOGY
The UV-950 is an extremely reliable and robust UV Curing System, designed for use in single-frame, manual operation applications and laboratory environments.
Compact Desktop Design compact and portable, the UV-950 does not require nitrogen or other special utility hookups, allowing for simple installation and full portability. Simply plug it in and it is ready to
SPECIFICATIONS
Wafer/Frame size: All standard sizes, up to 8” Effective UV wavelength: 365 nm Throughput: 50 frames/hr. *Timer: Omron 3HCA-A Electrical
utility: 110/240 Vac, 50/60 Hz Power: 100 W
Dimensions: (HxWxD)8”x19”x16” (19.8x48.5x40.5 cm) Height including cover clearance): 23” (58 cm) Weight: 44bs. (20 kg)
* For silicon wafer, using UV tape requiring curing irradiation of 200 mJ/cm2
HOW IT WORKS
1.Wafer/Frame is placed on glass irradiation surface.
2. Operator sets desired UV irradiation time on the timer and presses the Start button to initiate the irradiation cycle.
3. The Output progress display on the timer indicates cycle status.
4. When the preset cycle period ends, the UV lamps are switched Off and the irradiated Wafer/Frame is removed.
UV - 956
Single-frame, up to 8" wafers, UV dosage control, user-friendly digital display, lamp life indicator, lamp ON and UV intensity monitoring.
FEATURES
Compact Desktop Design - A compact system, the UV-956 does not require nitrogen or other special utility hookups, allowing for simple installation. Simply plug it in and it is ready to go.
Safe, Ozone-free UV Irradiation - Uses optimized wavelength for UV curing process. Low-pressure mercury vapor lamps do not require special cooling or nitrogen systems to counteract harmful ozone emissions. The UV-956 provides a safe operating environment and economical utility requirements.
TECHNOLOGY
The UV-956 is the most advanced system in its class, with built-in UV irradiation Dosage Control for controlled, repeatable UV tape curing for single-frame processing. The UV-956's digital control panel displays all process parameters on-line. The system handles all standard wafer/frame combinations up to 8" on its 300mm diameter UV irradiation window.
SPECIFICATIONS
Wafer/Frame size: All standard sizes, up to 8".
UV wavelength: 365nm.
Throughput: 50 frames/hr.*
Electronic Timer: Resolution: 1 sec.
Electrical utility: 110 or 240 Vac, 50/60 Hz.
Power: 100 W (peak).
Dimensions: (H x W x D) 8” x 19” x 16”
(20 x 48.5 x 40.5 cm).
Height: 23” (58 cm). (Cover open). Weight: 44 lbs. (20 kg).
* Test conditions: UV tape curing energy required
= 200mJ/cm2, with silicon wafer.
Specifications may be changed without prior notice.
HOW IT WORKS
TODO!!!
UV - 957
Single-frame, up to 12" (300mm) wafers, UV dosage control, user-friendly digital display, lamp life indicator, lamp ON and UV intensity monitoring.
FEATURES
Compact Desktop Design - A compact system, the
UV-957 does not require special utility hookups, allowing for simple installation. Just plug it in and it is ready to go.
Safe, Ozone-free UV Irradiation - Uses optimized wavelength for UV curing process. Low-pressure mercury vapor lamps do not require special cooling or nitrogen to counteract harmful ozone emissions. The UV-957 provides a safe operating environment and economical utility requirements.
TECHNOLOGY
The UV-957 is the most advanced system in its class, with built-in UV irradiation Dosage Control for controlled, repeatable UV tape curing for single-frame processing. The UV-957's digital control panel displays all process parameters on-line. The system handles all standard wafer/frame combinations up to 12" (300mm) on its 420mm diameter UV irradiation window.
SPECIFICATIONS
Wafer/Frame size: All standard sizes, up to 300mm.
UV wavelength: 365nm.
Throughput: 50 frames/hr.*
Electronic Timer: Resolution: 1 sec.
Electrical utility: 110 or 240 Vac, 50/60 Hz.
Power: 500 W (peak).
Dimensions: (HxWxD) 10.2” x 29.5” x 21.7”
(24 x 72.5 x 53.5 cm).
Height: 23” (58 cm) (cover open, with
clearance).
Weight: 120 lbs. (55 kg).
* Test conditions: UV tape curing energy required
= 200mJ/cm2, with silicon wafer.
Specifications may be changed without prior notice.
HOW IT WORKS
1.Wafer/Frame is placed on glass irradiation surface.
2. Operator sets desired UV irradiation time on the timer and presses the Start button to initiate the irradiation cycle.
3. The Output progress display on the timer indicates cycle status.
4. When the preset cycle period ends, the UV lamps are switched Off and the irradiated Wafer/Frame is removed.
UV - 9200
Fully automatic single cassette loader, up to 8", with auto-handling, individual lamp sensors, automatic irradiation time control, UV status indicator, UV intensity monitoring, cassette status indicator.
FEATURES
Fully Automatic - No operator contact with wafer frame during processing. Operator inserts wafer cassette into system, initiates process, then removes completed wafer cassette at the end of process cycle.
Continuous Processing Cycle - No wasted handling time between UV irradiation of individual wafer frames. Intelligent transport system maintains continuous wafer frame presence over UV lamps.
PC-control - Friendly WindowsTM interface. System displays UV intensity, process time, etc. in real-time. Quality Assurance data stored in process log.
Safe, Ozone-free UV Irradiation - Uses optimized wavelength for UV curing process. Low-pressure mercury vapor lamps do not require special cooling or nitrogen to counteract harmful ozone emissions. Provides safe operating environment and economical utility requirements.
TECHNOLOGY
TODO!!!
SPECIFICATIONS
Wafer size: 6” and 8”.
Frame/Cassette: Standard Disco/K&S 6” and 8”
(others by request).
UV wavelength: 365 nm.
Throughput: 12.5 minutes per 25-frames.*
Control unit: PC, with WindowsTM GUI.
Electrical utility: 110 or 240 Vac, 50/60 Hz.
Power: 400W.
Air: 72 p.s.i. (5 bar) c.d.a.
Dimensions: (H x W x D) 45” x 20” x 39”
(115 x 50 x 100 cm).
Footprint: 20” x 39” (50 x 100 cm). Weight: 209 lbs. (95 kg).
* Test conditions: UV tape curing energy required
= 200mJ/cm2, with silicon wafer.
Specifications may be changed without prior notice.
HOW IT WORKS
1. Wafer cassette containing frames with mounted
substrates awaiting UV exposure is placed on cassette
loading adaptor.
2. Operator selects desired pre-programmed UV exposure
recipe and starts the process cycle.
3. System scans wafer cassette to determine which slots
are populated. This information is used to optimize
material handling during processing cycle.
4. System automatically transports wafer/frames from
cassette to UV irradiation station, where frame is
processed according to programmed recipe.
5. During UV irradiation of frame, next frame is positioned
in standby position, so that when completed frame is
transported back to original location in cassette, the next
frame immediately receives UV irradiation. In this
manner, total cassette process cycle time is optimized.
6. When all wafer frames have been irradiated and returned
to cassette, the system indicates process completion on
monitor screen and signal tower. Operator removes
cassette to complete the process cycle.
UV - 9300
Fully automatic single cassette operation, up to 12" (300mm), with auto-handling, individual lamp sensors, automatic irradiation dosage control, UV status indicator, UV intensity monitoring, cassette status indicator.
FEATURES
Fully automatic.
Continuous processing cycle - for high throughput.
PC-controlled - with friendly WindowsTM interface.
Low Cost-of-Ownership.
Safe, ozone-free - low-pressure UV source.
Process 8” and 12” wafer frames/cassettes.
Requires no cooling utilities.
Economical footprint (58 x 111 cm).
TECHNOLOGY
TODO!!!
SPECIFICATIONS
Wafer size: 8” and 12”.
Frame/Cassette: Standard Disco/K&S 8” and 12”
(others by request).
UV wavelength: 365 nm.
Throughput: 12.5 minutes per 25-frames.*
Control unit: PC, with WindowsTM GUI.
Electrical utility: 110 or 240 Vac, 50/60 Hz.
Power: 500W.
Air: 72 p.s.i. (5 bar) c.d.a.
Dimensions: (H x W x D) 56” x 23” x 44”
(141*58*111 cm).
Footprint: 23” x 44” (58 x 111 cm). Weight: 286 lbs. (130 kg).
* Test conditions: UV tape curing energy required
= 200mJ/cm2, with silicon wafer.
Specifications may be changed without prior notice.
HOW IT WORKS
1. Wafer cassette containing frames with mounted
substrates awaiting UV exposure is placed on cassette
loading adaptor.
2. Operator selects desired pre-programmed UV exposure
recipe and starts the process cycle.
3. System scans wafer cassette to determine which slots
are populated. This information is used to optimize
material handling during processing cycle.
4. System automatically transports wafer/frames from
cassette to UV irradiation station, where frame is
processed according to programmed recipe.
5. During UV irradiation of frame, next frame is positioned
in standby position, so that when completed frame is
transported back to original location in cassette, the next
frame immediately receives UV irradiation. In this
manner, total cassette process cycle time is optimized.
6. When all wafer frames have been irradiated and returned
to cassette, the system indicates process completion on
monitor screen and signal tower. Operator removes
cassette to complete the process cycle.
UV - 365
UV Radiometer, extremely simple to use, with single-button operation switch and direct readout in mW/cm2 units.
FEATURES
UV-365 UV Radiometer Features
* Hand-held, single-button operation.
* Measures UV radiation at 365nm, with readout
in mW/cm2 units.
* Convenient tool for system calibration and safety
testing.
* Large-character, easy-to-read digital display.
* Uses standard 9V battery.
TECHNOLOGY
TODO!!!
SPECIFICATIONS
Dimensions: (H x W x D) 6.3” x 3.3” x 16”
(16 x 8.5 x 1.2 cm).
Battery: Procell PP3, or equivalent.
Measured Wavelength: 365nm (UVA).
Accuracy: +\- 10%.
Detector Lead Length: 27.5" (70 cm.)
(other lengths available upon request).
Specifications may be changed without prior
