Designed to attach two wafers by wax adhesion. Precise alignment: X,Y +/- 0.2mm ;
Theta +/- 1.0 Deg.
Final parallelism: +/- 0.02mm, for all standard wafer
frame sizes, up to 8”.
Temperature controlled platen.
Compact desktop design.
Manual operation.
TECHNOLOGY
TODO!!!
SPECIFICATIONS
Weight: 70 lbs. (32 kg)
Dimensions: (D x W x H) 12” x 15.5” x 31.5”
(30.5 x 39.5 x 80 cm).
Line Voltage: 110 - 120 Vac, 60 Hz, Single Phase , or
220 - 240 Vac, 50 Hz, Single Phase
Air Pressure: 5 bar.
